Multi-Source Deposition Laser Ablation/Sputtering Tool - Thin Film

Description

CUSTOM MADE - Works Well
Laser Ablation - Sputtering Machine with CryoTorr 10 Vacuum Pump
Condition: Used, Overall in Good Shape - Laser Control Electronics need repair; Sputtering sections are functional

Thin Flim operations

-Two Magnetron Sputtering Sections and one laser Ablation Section
-Deposits Multiple Film layers in one vacuum pump down
-Special feeder cart loads substrates, transported via programmable drive
-Configurable for multiple smaller wafers or large plates (up to 20" diagonal)
-User Spectron 3000 mJ ND - Laser for ablating high purity graphite, producing films from graphitic to diamond like carbon.
-Sputtering Sections compatible with targets ranging from smaller rounds to 20" rectangular (includes Cr, ITO, Mo, W, Al, Cu)
-Chamber Dimensions: 8ft Long with space for an additional section (e.g plasma etch)
- Top opens with a manual chain hoist for easy target changes and cleaning
- comes with CryoTorr 10 pump and chiller

RIGGING And Shipping are extra.
Additional pictures and information are available